The project is a collaboration between Pyreos Ltd, an Edinburgh-based SME who is a world leader in developing thin film pyroelectric infrared sensors, Korvus Technology an Oxford-based SME who manufactures highly customizable advanced modular sputtering (PVD) equipment and Imperial College, with world leading expertise in thin film deposition control, characterization and analysis as well as pyroelectric and ferroelectric oxides. The purpose of the project is to advance the state-of-the-art of depositing thin film pyroelectric oxides as well as piezoelectric and ferroelectric oxides generally, in order to obtain thin films with enhanced performance characteristics as well as substantially improved uniformity, repeatability and stability for volume manufacturing compared to what is available today. By developing and adding new process control and monitoring capabilities to a prototype sputter tool first and a production tool later, will enable the growth of thin film oxides for pyroeletric and other ferroelectric applications to be better understood. As a result, it is expected that the factors affecting the deposition can be controlled in order to produce pyroelectric thin films with significantly improved repeatability and uniformity for higher volumer manufacturing. Further, enhancements to the fundamental peformance chracteristics of the pyroelectric/ferroelectric film will be explored and developed based on altering the microstructure and composition of the films. This project is vital for maintaining a strong UK presence in the growing area of MEMS sensors for a high tech based economy.